EC Non-Vacuum Chucks - Carrier/Recess Design

These non-vacuum, recess type chucks are used with the PWM32 Spinner Series as well as the EC101/PM101 Spinner Series. The recess chuck is made of anodized aluminum and is machined to specifications obtained from the user.

The substrate is held in a pocket that closely conforms to the substrate's dimensions. The top surface of the substrate is essentially level with the top surface of the chuck, thus giving the appearance (from a coating point of view) of a circular substrate. No vacuum is used to hold the substrate, however, slots that extend from the backside of the chuck to the cavity beneath the substrate induce a negative cavity pressure while spinning, which holds the substrate in place. These slots also provide drainage for any fluids that enter the cavity around the edges of the substrates. An o-ring vacuum sub-chuck secures the recess carrier to the rotating spindle. Since the sub-chuck can accommodate various sizes of recess carrier chucks, the user can easily switch between different sizes of substrates.

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