EC Vacuum Chucks - Raised Center Flat Surface

These vacuum chucks are used with the PWM32 Spinner Series and the EC101/PM101 Spinner Series. The flat surface chuck holds thin, flat substrates such as silicon glass or germanium. The scroll design on the top surface of the chuck aids in the distribution of vacuum. The shaft size is 3/8".

The raised center chuck's skirt is a machined part of the chuck. The plastic skirt has been designed to keep the mass down, while still enjoying the benefits of a raised center chuck. The skirt provides for easier visual alignment, provides some backside protection, and makes loading the substrates safer in helping to reduce the chance of dropping the substrate into the bowl.

As a general rule, the substrate should overhang the chuck by approximately 1/4". The required vacuum is 17 to 25 Hg.

Features:

• Flat Surface Finish
• O-Ring Chuck-to-Shaft Seal
• Skirt Aids in Centering

The chart below shows standard stainless steel chuck sizes that have been designed. We have or can custom design chucks of many other sizes and possibly other materials upon request.

Select Below for Information on All Chucks