The MC22 is a versatile spin/scrubbing system used to clean substrates with a specially cleaned, disposable, cloth disc while being flooded with deionized water and/or customer supplied cleaning solution. The desired result is an extremely clean surface to be used in progressive steps in the substrate's manufacturing process .

All spin/scrubbing takes place inside a large, 22 inch I.D., stainless bowl mounted in an open-top cabinet which has clear side panels and doors. The technique of dispensed fluid hitting the spinning substrate, combined with the mechanical scrubbing action of the cloth fibers, generates a significant amount of surface energy for a thorough cleaning process. Automatic movement of the cleaning cloth removes not only surface contaminants, but can, in some cases, modify the surface by breaking off epi or polysilicon spikes, without scratching the surface of the substrate. The automatically dispensed fluid acts as a coolant, lubricant, and a carrier of the loosened particles during the scrubbing process.

Note: The Scrub unit should be installed beneath an appropriate down-flow, laminar air filtration system. An optional air filtration system can be provided by Headway Research, Inc., resulting in a complete stand alone substrate scrubbing station.

Chucks: This system uses any chucks from the Headway "LS" family. Specials are designed for specific substrates not already covered by prior designs.