![]() |
Special Offer
Discounted Demonstrator PWM32-PS-CB15PL Spin Coater Click here to download a PDF paper for more details on this spinner For more information: | ||||||||||||||||||||||||||||||||||||||||||
LS22 Controllers and MotorsLS22 Controller Options For the needs of different processes, LS22 spinners come with three pulse-width modulated (PWM) controller options. The programmable MP100 controller supports highly complex processes, with memory for a variety of event recipes that can be called by number. The software that comes with the MP100 handles as many as four fluids in up to 10 recipes with variable accelerations and speeds for coating, developing and cleaning processes. More extensive programming is also possible. A key panel and large alphanumeric display simplify operation and programming. The MP100 is compatible with a large number of simple and complex dispensers.
The PWM202 and the MP100 controllers operate at 115 volts ac, 50/60 Hz. The controllers supply all power to the system, including 24 volts for dc circuit control. Transformers are available for 220 volt ac operation. The PWM32 controller has a digital readout tachometer and a keypad entry for programming. The unit has multiple recipe memory (program sequences) and can store up to 10 separate recipes with up to 9 separate program steps per recipe. The liquid-crystal display (LCD) displays rpm, process times, programming prompts and input and system status information. The speed and acceleration can be set uniquely in every program step and the speed can be manually adjusted while the process is running. The PWM32 controller has an internal transformer for 110/220 volt ac 50/60 Hz operation.
LS22 System Components
Headway Spinner Systems
PWM32 Spinner Family| IT22 Spinner/Developer | LS22 Large Substrate Spinner Family | Refurbished/Demo Units | R & D Spinner for 200 mm & 300 mm Wafers | MV4000 Vapor Cleaner | PS80 Manual Spin Cleaner
Headway Research, Inc. Phone (972) 272-5431 Crest Communications, Inc. |
|||||||||||||||||||||||||||||||||||||||||||